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Startseite About AE News & Events Authors Robert Andosca

Robert Andosca

Advanced Energy

Dr. Robert Andosca is the Director, Worldwide Applications Technology focusing on plasma-based deposition and etch of thin films materials for Advanced Energy. He has 25+ years’ experience in the semiconductor, microelectromechanical systems (MEMS) and photovoltaic industries.

Artikel veröffentlicht von Robert Andosca

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Lowering Production Cost of “Big MEMS” Chip Technologies using Large Area Manufacturing Techniques

By Robert Andosca

Since the 1980s, microelectromechanical systems (MEMS) based devices have been manufactured primarily on round silicon substrates.

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