Dynamic Reverse Pulsing – What About Duty Cycle?
Veröffentlicht Oktober 16, 2023 von Gayatri Rane
A previous blog showed that Dynamic Reverse Pulsing (DRP) mode offers several benefits to reactive sputtering of SiO2 through the reduction of substrate heat load by about 12% and delivered a 10% increase in deposition rate when compared to conventional bipolar pulsed (BP) dual-magnetron sputtering. DRP mode halves the power applied to each magnetron and shares the pulsing with an explicit anode, as opposed to bipolar mode in which the two targets alternate as cathode and anode with a 50/50 duty cycle (Figure 1). DRP mode maintains a high duty cycle such that the polarity is reversed on the anode only for a short time, about 5 to 30% with the goal being to sufficiently discharge target electrical charge buildup.
Figure 1: DRP vs Bipolar Pulsed Mode
Studies indicate lower plasma spread, resulting in reduced heating, towards the substrate with DRP has been attributed partly to the effect of the magnetic field on electron movement and plasma confinement. In Bipolar (BP) mode, where the targets alternate as anode and cathode, the anode is magnetic so that electrons are magnetically shielded and can reach the anode only along field lines. The secondary electrons emitted from the cathode are, therefore, concentrated in the cathode vicinity increasing the plasma density in front of the substrate. In contrast, in the case of DRP mode, if the non-magnetic anode intersects with the magnetic field line of the target, it will effectively collect the electrons so that they are not lost to the plasma and thus do not contribute to substrate heating1.
The roles of both the duty cycle and the anode are of particular interest when it comes to DRP mode. We studied the effect of different duty cycles on process and film properties. Tests were performed in an industrial drum coater with dual rotary targets and an anode placed between the targets, as shown in Figure 2.
Figure 2. Industrial drum coater (left) and the process door (right) with the dual rotary targets and anode used for the tests
Experimental set-up: Two synchronized Advanced Energy Ascent® SMS/DMS AP power supply units operating at 6 kW on each side (i.e., totaling 12 kW) with a pulsing frequency of 80 kHz were used for depositing 200 nm SiO2 films from Si targets in an Ar/O2 atmosphere. Duty cycles (i.e., the ON times of Cathode/Anode) of 80/20, 70/30, 60/40 and 50/50 were employed.
Figure 3. (Left) Hysteresis curves obtained in voltage regulated mode for reactive sputtering of Si with DRP configurations at different duty cycles. (Right) Discharge voltage/current for the film depositions with different duty cycles in DRP mode
Figure 3 (left) shows the hysteresis curves obtained with voltage regulation for the different duty cycles. Reducing the on time on the cathodes yielded a hysteresis curve shift to higher voltages (lower current). Beneficially, lower O2 flow was required to achieve an equivalent working process condition in the curve (indicated for 80% position in the transition region with arrows). Films deposited at these equivalent working points yielded a similar refractive index and composition. However, with a reduction in duty cycle, the power-normalized dynamic deposition rate decreases (7%) and the substrate heat load increases (3%) as shown in Figure 4.
![A group of different colored bars
Description automatically generated](data:image/png;base64,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)
Figure 4. 200 nm SiO2 film properties as a function of DRP duty cycle
It should be noted that with DRP50, the heat load is still lower and the DDR is still higher when compared to those with BP mode (as discussed in our previous blog). However, with decreasing duty cycle the films appear to get smoother, and the surface asperities flatten and become larger as illustrated in the AFM images in Fig. 5
Figure 5: Figure 3. AFM images (stretched z-scale on top and non-distorted z-scale in the bottom row) of SiO2 films deposited with different duty cycles in the DRP mode.
To summarize, the experiments demonstrate how changing the duty cycle can allow process engineers to optimize deposition conditions and film properties.
And what about the anode? We will discuss this in an upcoming blog, so keep following us for more interesting tests and results as we work towards understanding DRP mode further.
References
Figure 1: DRP vs Bipolar Pulsed Mode
Studies indicate lower plasma spread, resulting in reduced heating, towards the substrate with DRP has been attributed partly to the effect of the magnetic field on electron movement and plasma confinement. In Bipolar (BP) mode, where the targets alternate as anode and cathode, the anode is magnetic so that electrons are magnetically shielded and can reach the anode only along field lines. The secondary electrons emitted from the cathode are, therefore, concentrated in the cathode vicinity increasing the plasma density in front of the substrate. In contrast, in the case of DRP mode, if the non-magnetic anode intersects with the magnetic field line of the target, it will effectively collect the electrons so that they are not lost to the plasma and thus do not contribute to substrate heating1.
The roles of both the duty cycle and the anode are of particular interest when it comes to DRP mode. We studied the effect of different duty cycles on process and film properties. Tests were performed in an industrial drum coater with dual rotary targets and an anode placed between the targets, as shown in Figure 2.
Figure 2. Industrial drum coater (left) and the process door (right) with the dual rotary targets and anode used for the tests
Experimental set-up: Two synchronized Advanced Energy Ascent® SMS/DMS AP power supply units operating at 6 kW on each side (i.e., totaling 12 kW) with a pulsing frequency of 80 kHz were used for depositing 200 nm SiO2 films from Si targets in an Ar/O2 atmosphere. Duty cycles (i.e., the ON times of Cathode/Anode) of 80/20, 70/30, 60/40 and 50/50 were employed.
Figure 3. (Left) Hysteresis curves obtained in voltage regulated mode for reactive sputtering of Si with DRP configurations at different duty cycles. (Right) Discharge voltage/current for the film depositions with different duty cycles in DRP mode
Figure 3 (left) shows the hysteresis curves obtained with voltage regulation for the different duty cycles. Reducing the on time on the cathodes yielded a hysteresis curve shift to higher voltages (lower current). Beneficially, lower O2 flow was required to achieve an equivalent working process condition in the curve (indicated for 80% position in the transition region with arrows). Films deposited at these equivalent working points yielded a similar refractive index and composition. However, with a reduction in duty cycle, the power-normalized dynamic deposition rate decreases (7%) and the substrate heat load increases (3%) as shown in Figure 4.
Figure 4. 200 nm SiO2 film properties as a function of DRP duty cycle
It should be noted that with DRP50, the heat load is still lower and the DDR is still higher when compared to those with BP mode (as discussed in our previous blog). However, with decreasing duty cycle the films appear to get smoother, and the surface asperities flatten and become larger as illustrated in the AFM images in Fig. 5
Figure 5: Figure 3. AFM images (stretched z-scale on top and non-distorted z-scale in the bottom row) of SiO2 films deposited with different duty cycles in the DRP mode.
To summarize, the experiments demonstrate how changing the duty cycle can allow process engineers to optimize deposition conditions and film properties.
And what about the anode? We will discuss this in an upcoming blog, so keep following us for more interesting tests and results as we work towards understanding DRP mode further.
References
Gayatri Rane
Advanced Energy
As an R&D scientist at AE, with past experience in sputtering and thin film analysis, I am involved with the research activities of the Customer Solutions Lab in Karlstein am Main, Germany.
Mehr Beiträge von Gayatri Rane
durchsuchen
Kategorien A-Z
Tragen Sie sich in unsere Mailingliste ein
Abonnieren
Neueste Beiträge
View on X