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The next inflection in #semiconductor technology requires ultra-fast, synchronized impedance matching for the rapid pulsing, frequent transitions, and longer recipes of next-gen processes. The NavX™ RF matching network redefines tuning speed, sophistication, and RF generator synchronization for exacting plasma control across the most complex pulsing profiles. Its groundbreaking Advanced Selectable Tuning controls allow accelerated processing for impedance matching to your chosen number of process pulse states. This proprietary algorithm instantly reduces reflected power in processes with shorter RF on times. Paired with the eVerest™ generator, NavX RF match network completes AE’s latest RF plasma power delivery system, enabling unparalleled control of plasma characteristics as the industry sets its sights on Angstrom scale geometries.

The FC2500 can be used as a standalone capacitor charger, and if needed, various low voltage modules can be added to the unit to provide further system power. This functionality provides extra flexibility to power other systems and applications. Low voltage modules can be connected in parallel and in series for application that require higher voltage and current requirements. The FC2500 has a unique built in intelligent control for capacitor charging, higher charge rates and power limit control.  There is also added control and monitoring capability via the analog and PMBus digital intelligent control system.   The FC2500 improves end users time to market by simplifying EMI and low leakage current approvals needed at end applications. It also has IEC60101-1 3rd edition and IEC60101-1-2 4th edition (EMC) safety agency approval.

While Advanced Energy offers a broad range of standard products that address the needs of many industries, there are occasions when a standard product does not address all your application requirements. A custom solution may not be economical or meet scheduling needs. By using proven standard platforms as building blocks, we can develop cost-effective turnkey power solutions that meet your exact needs.