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Semiconductor
Semiconductor Applications
Deposition
AE offers a comprehensive portfolio for semiconductor deposition, including plasma power delivery, temperature measurement, temperature control, and wafer control solutions.
Etch
Advanced Energy's high-precision plasma power delivery systems provide exacting control of etch applications for high repeatability and yield.
Electron Beam Inspection
Advanced Energy delivers stable, reliable power to electron beam inspection systems. This exacting control enables highly accurate defect identification, ensuring that memory and logic devices meet stringent specifications.
Implant
AE power products are engineered with a focus on optimizing efficiency and power density to ensure precise control of ion energy.
RF Generator Calibration
Utilizing Advanced Energy power meters for field calibration of RF generators maintains accuracy and confidence in your semiconductor processing equipment.
Strip
Precision control of power in plasma etching is critical to ensure flawless stripping of the wafer surface, leaving it free of any potential defects.
New
NavX™
Ultrafast, RF-synchronized Tuning to Multi-Level Pulse States
Featured Products
Featured Resources
Etching and Wafer Fab Equipment Application Note
RPS Chamber Anodization White Paper
3 Tips for Sourcing Chamber Cleaning RPS Systems
Electrostatic Semiconductor Wafer Clamping/Chucking System (ESC) Application Note
Semiconductor Case Study
