Implant

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As chip designs evolve in complexity, the need for precise control over implanted ions increases. AE power products are engineered with a focus on optimizing efficiency and power density to ensure precise control of ion energy.

Precision Power for Impeccable Ion Implantation

With the ever-increasing complexity of chip designs, ion implantation is a crucial step that helps to regulate the electrical properties of different circuits. Advanced Energy's power products optimize efficiency and power density for precise ion energy control. Our portfolio of AC/DC and DC/DC front-end solutions covers a wide output power range, with options for both 12 and 48 V output voltage. We also offer a variety of industry-standard board-mounted power modules that are extensively used by OEMs and system integrators.

Featured Products

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Paramount RF Generator

Industry-Leading, Repeatable Power Delivery for Core Plasma Applications

Datasheet

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Paramount Plus RF Generator

Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

Datasheet

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Greater than 1 kW

Advanced Energy is a leader in high-power solutions, providing a range of products for applications that require greater than 1 kW power.

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600 W and Above

Advanced Energy powers industries with high voltage amplifiers designed to go up to 50 kV, reaching 600 W.

Paramount RF Generator Datasheet	RF Plasma Generators	Industry-Leading, Repeatable Power Delivery for Core Plasma Applications
Paramount Plus RF Generator Datasheet	RF Plasma Generators	Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications
Greater than 1 kW		Advanced Energy is a leader in high-power solutions, providing a range of products for applications that require greater than 1 kW power.
600 W and Above		Advanced Energy powers industries with high voltage amplifiers designed to go up to 50 kV, reaching 600 W.
Bipolar		Improve Throughput and Virtually Eliminate Sticky Wafer and Wafer Popping Issues

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Featured Resources

Electrostatic Semiconductor Wafer Clamping/Chucking System (ESC) Application Note

The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing.

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Technical Videos

Revolutionized Thermal Measurement: AE’s 4100T Pyrometer

Jul 17, 2024

The Advanced Energy 4100T pyrometer stands at the pinnacle of innovation in thermal measurement technology, offering unmatched accuracy, reliability, and efficiency for advanced industrial applications. Designed as a multi-channel, non-contact optical fiber temperature pyrometer, the 4100T series is the ideal solution for environments demanding precise temperature control. By integrating the 4100T pyrometer into their processes, industrial and semiconductor manufacturers can achieve greater efficiency, improved product quality, and significant cost savings.

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Implant

Precision Power for Impeccable Ion Implantation