Home Products High Voltage Power Supplies E-Chuck

E-Chuck

For decades, Advanced Energy's Trek e-chuck supplies have been integral to the semiconductor industry. By employing a Trek supply, you can enhance your throughput, increase uptime, virtually eliminate issues like sticky wafers and wafer popping, and also reduce backside gas errors.

E-Chuck

Bipolar

Control parameters such as over-current, wafer-present, and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control
Increases efficiency and throughput with custom clamp and declamp sequences and wave shapes
Eliminates sticky/popping wafer issues

Dual Polarity C Series

Fast-rise charging power delivered from an optimized design
Limited overshoot, typically less than 1% of high voltage setpoint, depending on the application
Fully-integrated dual output package

Featured Resources

Electrostatic Semiconductor Wafer Clamping/Chucking System (ESC) Application Note

The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing.

View Resource

Technical Documentation

Title	Type
Derating of Aluminum Electrolytic Capacitors in High Voltage Power Supplies Application Note (202 KB)	Application Note
Electrical Termination and Mounting Configurations of High Voltage Power Supplies Application Notes (307 KB)	Application Note
Electrostatic Semiconductor Wafer Clamping/Chucking System (ESC) Application Note (607 KB)	Application Note
Modifiable and efficient power supplies for collaborative robots (81 KB)	Application Note
Performing Isolation Tests on High Voltage Power Supplies Application Note (426 KB)	Application Note
Protection of High Voltage Power Supplies in Single and Multiple Applications Application Note (399 KB)	Application Note
Remote Control of High Voltage Power Supplies Application Note (686 KB)	Application Note
UltraVolt HVPS Polarity Reversing Configurations Application Note (325 KB)	Application Note
HVPS Overview Brochure (735 KB)	Brochure
Trek 645 Data Sheet (111 KB)	Data Sheet
Trek 646 Data Sheet (116 KB)	Data Sheet
UltraVolt Dual Polarity C Series Data Sheet (1 MB)	Data Sheet

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