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Plasma Power Products

Advanced Energy’s field-proven, Precision Power^TM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes with our plasma power generators’ precise performance and comprehensive controls and capabilities.

Plasma Power Product Types

Power Delivery Systems

Advanced Energy’s field-proven Precision Power™ solutions offer best-in-class control and stability across a wide range of plasma power applications.

Pulsed and DC Power Systems

Extend process innovation with Advanced Energy’s comprehensive DC and pulsed-DC suite.

Remote Plasma Sources

Advanced Energy’s remote plasma sources offer sophisticated options in streamlined designs.

RF Match Networks

Advanced Energy’s match networks expertly perform in multiple power ranges.

Custom and Modified Standard

RF Plasma Generators

Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements.

Featured Products

Featured

eVerest RF Generator

Angstrom Era Precision Power

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Featured

MAXstream Remote Plasma Source

Reliable Performance for Chamber Clean Applications

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Related Applications

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Technical Videos

Advanced Energy’s eVoS™: A Paradigm Shift in Semiconductor Bias Technology

Feb 6, 2024

Learn more about AE's eVoS(TM) Assymetric Bias Waveform Generator: By maximizing the ability to tailor ion energy, eVoS enables precise command of #semiconductor etch and deposition geometries at very small dimensions. Direct control of wafer-surface voltage and ion energy distribution (IED) empowers process engineers to optimize bias performance for specific process results, ensuring sensitive feature formation. In addition, fast digital metrology and novel control algorithms enable the production of narrower IEDs compared to alternative technologies. These capabilities change what’s possible in plasma processing.

Introducing the eVerest RF Generator and eVoS ME Bias Solution

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