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Omni™ RF Diagnostic Cart
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Calibrate with Accuracy, Optimize with Confidence.
The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes. It provides accurate RF calibration and diagnostics by combining AE’s 5540A RF Power Meter with PowerInsight by Advanced Energy™ IoT enabled data ecosystem into a single, user-friendly cart.
Features
- One RF power meter (combination of sensor and meter design) can be configured up to six frequencies
- Power accuracy of ±0.5% + 0.5 W across power range
- Frequency range band of 0.2 to 200 MHz, 5 kW
- Automatic or manual modes of measurement
- Metadata tagging and data storage capability for long term monitoring
- Local and remote monitoring access via touchscreen, HDMI, USB-C, or LAN
- Dashboards and alerts for visualization and predictive analytics
- Data export to CSV file
- Mobile cart with four locking swivel casters
Benefits
- Optimize RF power delivery for critical semiconductor processes
- Configuration of up to 6 frequencies within a single sensor lowers investment cost (covers 400 kHz, 2 MHz, 13.56 MHz, 27 MHz, 40 MHz, 60 MHz, and more)
- Yearly calibration of the sensor – ease of maintenance and lower operating costs
- Agnostic – measures RF power from non-AE power products
- Accessibility to sensor for ease of calibration and servicing
- Unique data collection features to track trends and reduce equipment downtime and operational costs
- Mobile design for easy navigation within fabs
- Customizations provided upon request
Featured Resources
Technical Documentation
Product Information Documents
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