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RF Delivery System eVerest™ and NavX™
Unleash the Power
Features
- ±10% frequency range
- PowerInsight by Advanced Energy IoT platform
- Multi-level pulse tuning
- Accelerated internal signal processing
- Frequency tuning
Benefits
- Ultimate control of plasma characteristics
- Expanded access to new energy regimes
- Increased power stability during pulsing and process transitions
- Unprecedented RF power repeatability run-to-run
Specifications
| Cooling: | Water |
|---|---|
| Output Frequency (MHz, kHz): | 1 to 60 MHz |
| Input Voltage (V): | 208, 400-480 VAC |
| Power Level (kW): | 3.5 to 10 kW |
| Rack Width: | Half and Full rack |
| Height (Inches): | 3U |
| Communications Interface: | EtherCAT, Ethernet, RS-232 |
| Advanced Features: | Multi-level Pulsing, arc management, CEX, MBFT |
Featured Resources
eVerest and NavX RF Delivery System
Forming a complete RF delivery system, the eVerest™ RF generator and NavX™ matching network propel process innovation as chips approach Angstrom scale geometries
eVerest Brochure
eVerest’s configurable multi-level pulsing enables instantaneous or user-defined transition timing. Download eVerest brochure for details on benefits, features, specifications and more.
NavX Matching Network Brochure
Innovate beyond the nanometer. The NavX™ matching network redefines tuning speed, sophistication, and RF synchronization for exacting plasma control across the most complex pulsing profiles
Technical Documentation
Technical Videos
Unleash the Power: NavX™ RF Matching Network
Services
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
