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RF Delivery System eVerest™ and NavX™
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Unleash the Power
Forming a complete RF delivery system, the eVerest RF generator and NavX matching network propel process innovation as chips approach Angstrom scale geometries.
Features
- ±10% frequency range
- PowerInsight by Advanced Energy IoT platform
- Multi-level pulse tuning
- Accelerated internal signal processing
- Frequency tuning
Benefits
- Ultimate control of plasma characteristics
- Expanded access to new energy regimes
- Increased power stability during pulsing and process transitions
- Unprecedented RF power repeatability run-to-run
Specifications
| Cooling: | Water |
|---|---|
| Output Frequency (MHz, kHz): | 1 to 60 MHz |
| Input Voltage (V): | 208, 400-480 VAC |
| Power Level (kW): | 3.5 to 10 kW |
| Rack Width: | Half and Full rack |
| Height (Inches): | 3U |
| Communications Interface: | EtherCAT, Ethernet, RS-232 |
| Advanced Features: | Multi-level Pulsing, arc management, CEX, MBFT |
Technical Documentation
Technical Videos
Unleash the Power: NavX™ RF Matching Network
Jun 25, 2024
The next inflection in #semiconductor technology requires ultra-fast, synchronized impedance matching for the rapid pulsing, frequent transitions, and longer recipes of next-gen processes. The NavX™ RF matching network redefines tuning speed, sophistication, and RF generator synchronization for exacting plasma control across the most complex pulsing profiles. Its groundbreaking Advanced Selectable Tuning controls allow accelerated processing for impedance matching to your chosen number of process pulse states. This proprietary algorithm instantly reduces reflected power in processes with shorter RF on times. Paired with the eVerest™ generator, NavX RF match network completes AE’s latest RF plasma power delivery system, enabling unparalleled control of plasma characteristics as the industry sets its sights on Angstrom scale geometries.
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