.svg){kind=logo}
.png)
new
RF Delivery System eVerest™ and NavX™
Active
Unleash the Power
Forming a complete RF delivery system, the eVerest RF generator and NavX matching network propel process innovation as chips approach Angstrom scale geometries.
Features
- ±10% frequency range
- PowerInsight by Advanced Energy IoT platform
- Multi-level pulse tuning
- Accelerated internal signal processing
- Frequency tuning
Benefits
- Ultimate control of plasma characteristics
- Expanded access to new energy regimes
- Increased power stability during pulsing and process transitions
- Unprecedented RF power repeatability run-to-run
Specifications
| Cooling: | Water |
|---|---|
| Output Frequency (MHz, kHz): | 1 to 60 MHz |
| Input Voltage (V): | 208, 400-480 VAC |
| Power Level (kW): | 3.5 to 10 kW |
| Rack Width: | Half and Full rack |
| Height (Inches): | 3U |
| Communications Interface: | EtherCAT, Ethernet, RS-232 |
| Advanced Features: | Multi-level Pulsing, arc management, CEX, MBFT |
Featured Resources
eVerest and NavX RF Delivery System
Forming a complete RF delivery system, the eVerest™ RF generator and NavX™ matching network propel process innovation as chips approach Angstrom scale geometries
View Resource
eVerest Brochure
View Resource
NavX Matching Network Brochure
Innovate beyond the nanometer. The NavX™ matching network redefines tuning speed, sophistication, and RF synchronization for exacting plasma control across the most complex pulsing profiles
View Resource
Technical Documentation
Product Information Documents
Insights & Studies
Technical Videos
Unleash the Power: NavX™ RF Matching Network
Jun 25, 2024
The next inflection in #semiconductor technology requires ultra-fast, synchronized impedance matching for the rapid pulsing, frequent transitions, and longer recipes of next-gen processes. The NavX™ RF matching network redefines tuning speed, sophistication, and RF generator synchronization for exacting plasma control across the most complex pulsing profiles. Its groundbreaking Advanced Selectable Tuning controls allow accelerated processing for impedance matching to your chosen number of process pulse states. This proprietary algorithm instantly reduces reflected power in processes with shorter RF on times. Paired with the eVerest™ generator, NavX RF match network completes AE’s latest RF plasma power delivery system, enabling unparalleled control of plasma characteristics as the industry sets its sights on Angstrom scale geometries.
Close Popup
Services
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
24/5 Support Available
Get Expert Advice From Our Engineers
We are committed to providing excellent customer service and technical support to our customers. With live chat and phone support, you can reach out to a qualified engineer for help at any time.
Get Support Now