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RF Plasma Generators

From various mounts and sizes to full digital control and dynamic plasma response, our RF generators ignite process innovation. Choose from a broad range of models and access unique features for configuration and control to meet specific application requirements.

RF Plasma Generators

eVerest RF Generator

  • Full RF delivery system, multiple options for matching solutions, and intelligent synchronization
  • Speed and control within programmable multi-level pulse profiles
  • High-speed RF output response and pulse-state rise/fall times

Paramount Plus RF Generator

  • Precise RF and pulse control
  • Fast response to plasma changes
  • Built-in diagnostic tools

Paramount RF Generator

  • Full digital control
  • High power output
  • Enables high plasma density and ion energy

Apex RF Generator

  • High power density
  • Compact installation
  • High-speed arc management

Featured Products

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eVerest RF Generator

Angstrom Era Precision Power

Datasheet

Featured Resources

eVerest Brochure

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Forward and Reflected Power: What Does It Mean?

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Three Key Cabling Decisions to Optimize RF System Performance

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Technical Documentation

Title Type
Apex and Paramount RF Generator Comparison (357 KB) Application Note
Paramount Implanter Tools (324 KB) Application Note
Precise Power Control in 3D Device Architectures (647 KB) Application Note
eVerest and NavX RF Delivery System (5 MB) Brochure
eVerest Brochure (12 MB) Brochure
eVerest™ RF電力供給システム (18 MB) Brochure
PowerInsight by Advanced Energy (6 MB) Brochure
RF Calibration Solutions (530 KB) Brochure
Apex RF Data Sheet (504 KB) Data Sheet
Navigator II Digital Matching Networks Brochure (10 MB) Data Sheet
Paramount Plus Data Sheet (5 MB) Data Sheet
Paramount Series Data Sheet (4 MB) Data Sheet
Forward and Reflected Power: What Does It Mean? (576 KB) White Paper

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