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Sekidenko MXE Series
Active
High-Speed, Non-Contact Optical Temperature Pyrometer with Integrated Reflectance Measurement and Emissivity Compensation
The Sekidenko MXE pyrometer combines speed and precision, enabling accurate, non-contact, repeatable measurement and control of demanding applications. Its high-speed (up to 10 kHz) performance is ideal for processes with moving targets, such as rotating susceptors. It is also extremely well-suited for dynamic processes, including laser-based processing or rapid anneals. The remarkably compact MXE is easily integrated. Its flexible control options support a variety of I/O protocols.
Features
- In-situ, non-contact temperature and emissivity measurement
- High-speed measurement ideal for a variety of applications
- Variety of temperature and reflectance wavelengths
- EtherCAT®, USB, and RS-232 output option
Benefits
- Improves temperature-measurement accuracy for critical processes
- Enhances repeatability and minimizes variation
- Increases productivity, yield, and throughput
- Increases stability and reliability across multiple chambers and substrate materials
Specifications
| FOV (minimum spot size) (mmm): | (2 to 8) |
|---|---|
| Interface / Output (mA): | Multiple options available. Please refer to Datasheet. |
| Accuracy: | ±1.5 °C |
| Weight (kg): | 1.54 |
| Wavelength Repeatability (pm): | ±0.1 |
Technical Documentation
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