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Sekidenko OR400T Series
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Compact, Single-Channel Optical Fiber Temperature Pyrometer for High-Volume Semiconductor Applications
The Sekidenko OR400T is a single-channel, non-contact optical fiber temperature pyrometer that measures infrared energy being emitted from an object and converts it into usable temperature data (degrees °F or °C). The Sekidenko OR400T can be configured in a variety of measurement wavelengths based on target materials, process temperature ranges, and working distances from 3.9 in (100 mm) to 118.1 in (3000 mm). Available temperature ranges are: 122°F (50°C) to 2912°F (1600°C).
Features
- In-situ, non-contact temperature measurement employing lensed optical sensors or sapphire light pipe sensors
- Industry-leading temperature and read rates
- Highly flexible, module-based platform architecture
- Full I/O and external trigger/synchronization suite
- Multi-channel capability and read rates up to 2 kHz
Benefits
- Improves temperature-measurement accuracy for critical processes
- Enhances repeatability and minimizes variation
- Increases productivity, yield, and throughput
- Increases stability and reliability across multiple chambers and substrate materials
- Customizes to meet unique functional and mechanical requirements
Specifications
| Operational temperature range (°C): | 50 to 3500 |
|---|---|
| Spectral Range (µm): | 600 to 1600 |
| Interface / Output (mA): | RS232 |
| Accuracy: | ±1.5 °C |
| Weight (kg): | 0.33 |
| Wavelength Repeatability (pm): | ±0.1 |
Technical Documentation
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