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Don van Zyl
Advanced Energy
With over 20 years of engineering experience, Don brings a deep knowledge of RF power systems. At Advanced Energy, he serves Director of RF Engineering, one of the key members of our technical staff, managing development of some of AE’s key solutions. Prior to AE, he served in several engineering leadership roles at Reutech Systems. Don holds a PhD from the University of Texas and a masters degree and two bachelors degrees from the University of Stellenbosch.
掲載記事 Don van Zyl
Blog
Newly Revised SEMI E135 Standard Helps Semiconductor Fabrication Plants Select the Best RF Generator for Their Application
3月 19, 2019
I recently was part of a group brought together by SEMI to redefine SEMI E135, the standard applied to test methods for determining the transient response of a radio frequency (RF) generator used in RF power delivery systems for semiconductor processing equipment.