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Advanced Energy Enhances Non-Contact Optical Fiber Thermometer for Improved Accuracy in Semiconductor Process Measurements

投稿 7月 09, 2024

Multi-channel fiber optic delivers industry-leading accuracy and temperature range enabling critical sensing for process efficiency and yield improvement 

DENVER, Colo., July 9, 2024 —
Advanced Energy Industries, Inc. (Nasdaq: AEIS) – a global leader in highly engineered, precision power conversion, measurement and control solutions – has announced the Sekidenko 4100T, a new version of its special materials pyrometer that provides the high-accuracy, non-contact temperature measurement demanded by next-generation semiconductor wafer applications.

Precise, non-contact temperature measurement simplifies process control in semiconductor manufacturing equipment and eliminates reliance on less accurate simulations and estimates. The upgraded 4100T non-contact optical fiber thermometer (OFT) supports enhanced in-situ process monitoring and control by combining flexible, multi-channel measurement options with a ground-up redesign improving performance at traditionally difficult to measure sub-250°C temperature ranges.

“Temperature measurements based on thermocouples and other contact-based technologies significantly increase the potential for wafer damage and contamination, while non-contact approaches such as simulation and estimating tools are inaccurate,” said Dhaval Dhayatkar, vice president, Critical Sensing and Control, Industrial Power Products at Advanced Energy. “Our Sekidenko 4100T OFT provides a solution that does not require wafer contact and ensures high-accuracy measurements, even at relatively low temperatures, giving manufacturers the data they need to optimize process efficiency, product quality and yield.”  

Supporting direct replacement for older systems, the upgraded 4100T provides simultaneous, high-speed (1kHz) measurement up to four channels. These channels can be configured independently, with wavelengths ranging from Ultraviolet to 2,300 nm, and temperature ranges spanning 60°C to 3,000°C. This flexibility allows for rapid measurements and optimization on a variety of target materials, process temperature ranges and working distances. Fiber based cables allow for immunity to radio frequency and electromagnetic interference. The improved signal-to-noise ratio of the 4100T improves stability in applications where thermal radiation may be limited.

The 4100T is compatible with lensed optical sensors and sapphire light pipe sensors. It also has an intuitive touch-screen interface, which eliminates the need for a remote computer and provides access to all information and commands from a single screen. An integrated EtherCat interface simplifies integration into a full measurement and process control system.

For detailed product information and technical specifications, visit: Sekidenko 4100T Series | Multi-Channel, Non-Contact Optical Fiber Temperature Pyrometer with Configurable Wavelength Range | Advanced Energy.

 
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アドバンストエナジーインダストリーズ社(Nasdaq: AEIS)は、ミッションクリティカルなアプリケーションやプロセス向けの高度に設計された高精度電力変換、計測、制御ソリューションの設計および製造における世界的リーダーです。アドバンスドエナジーのパワーソリューションは、半導体装置、工業生産、医療、ライフサイエンス、データセンターコンピューティング、ネットワーキング、テレコミュニケーションなど、幅広い産業分野の複雑なアプリケーションにおける顧客の技術革新を可能にします。エンジニアリングのノウハウと、世界中のお客様への迅速なサービスとサポートにより、当社は技術の進歩に対応するための協力的パートナーシップを構築し、お客様の成長を促進し、電力の未来を革新します。アドバンストエナジーは40年にわたり、電力の完成に力を注いできました。本社は米国コロラド州デンバーにあります。

詳しくはwww.advancedenergy.com。

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