Omni™ RF Diagnostic Cart

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Calibrate with Accuracy, Optimize with Confidence.

The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes. It provides accurate RF calibration and diagnostics by combining AE’s 5540A RF Power Meter with PowerInsight by Advanced Energy™ IoT enabled data ecosystem into a single, user-friendly cart.

特徴

One RF power meter (combination of sensor and meter design) can be configured up to six frequencies
Power accuracy of ±0.5% + 0.5 W across power range
Frequency range band of 0.2 to 200 MHz, 5 kW
Automatic or manual modes of measurement
Metadata tagging and data storage capability for long term monitoring
Local and remote monitoring access via touchscreen, HDMI, USB-C, or LAN
Dashboards and alerts for visualization and predictive analytics
Data export to CSV file
Mobile cart with four locking swivel casters

メリット

Optimize RF power delivery for critical semiconductor processes
Configuration of up to 6 frequencies within a single sensor lowers investment cost (covers 400 kHz, 2 MHz, 13.56 MHz, 27 MHz, 40 MHz, 60 MHz, and more)
Yearly calibration of the sensor – ease of maintenance and lower operating costs
Agnostic – measures RF power from non-AE power products
Accessibility to sensor for ease of calibration and servicing
Unique data collection features to track trends and reduce equipment downtime and operational costs
Mobile design for easy navigation within fabs
Customizations provided upon request

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Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

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