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新しい
RF Delivery System eVerest™ and NavX™
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Unleash the Power
Forming a complete RF delivery system, the eVerest RF generator and NavX matching network propel process innovation as chips approach Angstrom scale geometries.
特徴
- ±10% frequency range
- PowerInsight by Advanced Energy IoT platform
- Multi-level pulse tuning
- Accelerated internal signal processing
- Frequency tuning
メリット
- Ultimate control of plasma characteristics
- Expanded access to new energy regimes
- Increased power stability during pulsing and process transitions
- Unprecedented RF power repeatability run-to-run
仕様
| 冷却: | Water |
|---|---|
| 出力周波数（MHz、kHz）: | 1 to 60 MHz |
| 入力電圧 (V): | 208, 400-480 VAC |
| 出力レベル（kW）: | 3.5 to 10 kW |
| ラック幅: | Half and Full rack |
| 高さ（インチ）: | 3U |
| 通信インターフェース: | EtherCAT, Ethernet, RS-232 |
| 高度な機能: | Multi-level Pulsing, arc management, CEX, MBFT |
技術文書
テクニカル・ビデオ
Unleash the Power: NavX™ RF Matching Network
6月 25, 2024
The next inflection in #semiconductor technology requires ultra-fast, synchronized impedance matching for the rapid pulsing, frequent transitions, and longer recipes of next-gen processes. The NavX™ RF matching network redefines tuning speed, sophistication, and RF generator synchronization for exacting plasma control across the most complex pulsing profiles. Its groundbreaking Advanced Selectable Tuning controls allow accelerated processing for impedance matching to your chosen number of process pulse states. This proprietary algorithm instantly reduces reflected power in processes with shorter RF on times. Paired with the eVerest™ generator, NavX RF match network completes AE’s latest RF plasma power delivery system, enabling unparalleled control of plasma characteristics as the industry sets its sights on Angstrom scale geometries.
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