ホーム製品紹介プラズマパワー製品パルスおよびDC電源システム

パルスおよび直流電源システム

アドバンスドエナジーの総合的なDCおよびパルスDC製品ラインナップは、蒸着速度を向上させ、膜の平坦性と充填密度を改善しながら、アーク放電を最小限に抑えるように設計されています。

パルスおよび直流電源システム

Ascent AMS II Pulsed and DC Power System

Water cooling
Modular and scalable
Embedded PowerInsight® by Advanced Energy™ IoT intelligence
Wide mains voltage range
Expanded operating range
Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
Set Point Compensation™ technology
Arc-Sync™ technology — primary/secondary up to 12 units
Ethernet, EtherCAT®, Profibus ,RS-232/485, Ethernet/IP, and analog communications

Ascent DMS Pulsed and DC Power System

Modular and scalable (40, 60, and 120 kW models configurable up to 240 kW)
Selectable frequency (500 Hz to 50 kHz)
Adjustable duty cycle — independent power ratio regulation for each magnetron

Ascent AP Pulsed and DC Power System

Process customization with extensive power delivery parameters
Advanced process management through a tiered approach to arc mitigation
Compact, single-unit solution (up to 30 kW)

Pinnacle III DC Power Supply

Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy

Pinnacle III Plus+ Pulsed DC Power Supply

Adjustable frequency range of 5 to 350 kHz 
Variable duty cycle up to 45% 
Wide voltage range — single-tap wide impedance range

PEII Low Frequency Power Supply

High power density
Wide tap range
Regulation on power, voltage, or current
Enhanced arc control
Automatic process safeguard
Flexible modularity
Efficient, compact design

Solvix® DC and Pulsed Power Supply

Proven reliability, accuracy, and repeatability
Worldwide support network
Reduced substrate damage and process contamination
Best-in-class arc handling
DC and pulsed-DC units
Current, power, and voltage regulation modes
Flexible architecture
Air cooling
Multiple units configurable for high-power requirements
High peak-to-peak voltages (high-frequency models)
Patented tapless wide output load impedance range (medium-frequency models)

Ascent AMS Pulsed and DC Power System

Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
Set Point Compensation™ technology
Arc Sync® technology — primary/secondary up to 12 units

注目製品

特集

Ascent AP Pulsed and DC Power System

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

データシート

技術文書

Product Information Documents

Ascent AP Data Sheet

パンフレット PDF 9 MB 10月26日, 2023

Ascent® AMS Brochure

Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design.

パンフレット PDF 2 MB 10月26日, 2023

Ascent® AMS II Brochure

パンフレット PDF 12 MB 5月7日, 2024

Ascent® DMS Brochure

The Ascent® DMS series offers unprecedented power delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics.

パンフレット PDF 8 MB 10月26日, 2023

PowerInsight by Advanced Energy

パンフレット PDF 6 MB 9月8日, 2023

Ascent Ams Datasheet

データシート PDF 309 KB 6月15日, 2023

Ascent SMS AP 10 Brochure

The Ascent SMS AP10 power supply is a highly configurable pulsed-DC solution embedded with AE's PowerInsight IIoT platform.

データシート PDF 5 MB 10月26日, 2023

PEII Series Data Sheet

データシート PDF 1 MB 6月15日, 2023

Pinnacle Plus Data Sheet

データシート PDF 2 MB 6月15日, 2023