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ホーム 製品紹介 プラズマパワー製品 パルスおよびDC電源システム

パルスおよび直流電源システム

アドバンスドエナジーの総合的なDCおよびパルスDC製品ラインナップは、蒸着速度を向上させ、膜の平坦性と充填密度を改善しながら、アーク放電を最小限に抑えるように設計されて います。

パルスおよび直流電源システム

Ascent AMS II Pulsed and DC Power System

  • Water cooling
  • Modular and scalable
  • Embedded PowerInsight® by Advanced Energy™ IoT intelligence
  • Wide mains voltage range
  • Expanded operating range
  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc-Sync™ technology — primary/secondary up to 12 units
  • Ethernet, EtherCAT®, Profibus ,RS-232/485, Ethernet/IP, and analog communications

Ascent DMS Pulsed and DC Power System

  • Modular and scalable (40, 60, and 120 kW models configurable up to 240 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron

Ascent AP Pulsed and DC Power System

  • Process customization with extensive power delivery parameters
  • Advanced process management through a tiered approach to arc mitigation
  • Compact, single-unit solution (up to 30 kW)

Pinnacle III DC Power Supply

  • Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy

Pinnacle III Plus+ Pulsed DC Power Supply

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 

PEII Low Frequency Power Supply

  • High power density
  • Wide tap range
  • Regulation on power, voltage, or current
  • Enhanced arc control
  • Automatic process safeguard
  • Flexible modularity
  • Efficient, compact design

Solvix® DC and Pulsed Power Supply

  • Proven reliability, accuracy, and repeatability
  • Worldwide support network
  • Reduced substrate damage and process contamination
  • Best-in-class arc handling
  • DC and pulsed-DC units
  • Current, power, and voltage regulation modes
  • Flexible architecture
  • Air cooling
  • Multiple units configurable for high-power requirements
  • High peak-to-peak voltages (high-frequency models)
  • Patented tapless wide output load impedance range (medium-frequency models)

Ascent AMS Pulsed and DC Power System

  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc Sync® technology — primary/secondary up to 12 units

注目製品

特集

Ascent AP Pulsed and DC Power System

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

データシート

技術文書

タイトル タイプ
Ascent AP Data Sheet (9 MB) パンフレット
Ascent® AMS Brochure (2 MB) パンフレット
Ascent® AMS II Brochure (12 MB) パンフレット
Ascent® DMS Brochure (8 MB) パンフレット
Glass Production Solutions Brochure (12 MB) パンフレット
Glass Production Solutions Brochure (12 MB) パンフレット
PowerInsight by Advanced Energy (6 MB) パンフレット
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) ケーススタディ
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB) ケーススタディ
Ascent Ams Datasheet (309 KB) データシート
Ascent SMS AP 10 Brochure (5 MB) データシート
PEII Series Data Sheet (1 MB) データシート
Pinnacle Plus Data Sheet (2 MB) データシート
Pinnacle Plus+ Halo Pulsed-DC Power Supplies Datasheet (337 KB) データシート
Pinnacle Series Data Sheet (2 MB) データシート
Pinnacle Series Datasheet (2 MB) データシート
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB) ホワイトペーパー
Optimizing Static Deposition Processes White Paper (779 KB) ホワイトペーパー
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB) ホワイトペーパー

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半導体

AEは、次世代の工程革新のために、洗練された高速制御による高精度のプラズマ電力供給を提供します。
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