.svg){kind=logo}
Ascent AMS II Pulsed and DC Power System
Stable, Repeatable Power | Water Cooling | Embedded IoT intelligence
特徴
- Water cooling
- Modular and scalable
- Embedded PowerInsight by Advanced Energy™ IoT intelligence
- Wide mains voltage range
- Expanded operating range
- Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
- Set Point Compensation™ technology
- Arc-Sync™ technology — primary/secondary up to 12 units
- Ethernet, EtherCAT®, Profibus, RS-232/485, Ethernet/IP, and analog communications
メリット
- High film quality and throughput
- Reduced film, substrate, and equipment damage
- Stable throughput and power delivery
- Easy integration and control
- Fast scaling to achieve high power levels
仕様
| 冷却: | Water |
|---|---|
| 入力電圧 (V): | 360 to 528 VAC, 50/60 HZ |
| 出力レベル（kW）: | 60 kW |
| ラック幅: | 19" Full rack |
| 高さ（インチ）: | 6U |
| 出力電圧範囲 (V): | Up to 1000 V |
| 通信インターフェース: | Ethernet, EtherCAT, Profibus, RS-232/485, EtherNet/IP, and analog |
| 高度な機能: | Embedded PowerInsight by Advanced Energy™ IoT intelligence |
技術文書
テクニカル・ビデオ
Exclusive Dynamic Reverse Pulsing Technology for Plasma Power
関連商品
サービス
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Field services and On-Site Training
Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
