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Ascent AMS Pulsed and DC Power System

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Stable Power Delivery for Extreme Arc Conditions and Highly Repeatable Films

As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability. Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design. The AMS provides advanced arc management, allowing maximum power delivery with faster recovery to process. Extreme fast recovery also means extremely low energy delivered through arcs, preventing substrate damage. For high power applications, the Ascent AMS can be used in primary/secondary configuration. Common applications include output configurations over 100 kW. However, the combined water/air cooling design keeps the generator footprint to a minimum.

特徴仕様技術文書サービス Support

特徴

Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
Set Point Compensation™ technology
Arc Sync^® technology — primary/secondary up to 12 units
Ethernet, EtherCAT^®, DeviceNet^®, Profibus, RS-232/485, Ethernet/IP, and analog communications

メリット

Obtain high film quality and throughput
Reduce film, substrate, and equipment damage
Achieve stable throughput and power delivery under extreme arcing conditions
Easily integrate and control

仕様

冷却:	Hybrid (air and water)
出力周波数（MHz、kHz）:	0.5 to 5 kHz
入力電圧 (V):	400, 440, 480 VAC
出力レベル（kW）:	30 to 60 kW
ラック幅:	Full rack
高さ（インチ）:	6U
出力電圧範囲 (V):	400-1000 V
通信インターフェース:	Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
高度な機能:	Progressive arc management
プロセスアプリケーション:	Deposition
点火電圧 (V):	1200

すべての仕様仕様の崩壊

技術文書

タイトル	タイプ
Ascent® AMS Brochure (2 MB)	パンフレット
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB)	ケーススタディ
Ascent Ams Datasheet (309 KB)	データシート
Optimizing Static Deposition Processes White Paper (779 KB)	ホワイトペーパー
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB)	ホワイトペーパー

サービス

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

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PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

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Submit an RMA Form