ホーム Products Plasma Power Products Pulsed and DC Power Systems Ascent AP Pulsed and DC Power System

Ascent AP Pulsed and DC Power System

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Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

Building on AE®’s premier bipolar pulsed-DC technology, Ascent® AP power supplies extend your ability to optimize output with advanced pulse shaping, as well as four-block progressive arc management that includes full voltage reversal and self-adjusting arc parameters. This compact solution’s patented pulsing technology proactively inhibits arcs, while its wide operational range unlocks material options to extend single- and dual-magnetron process flexibility and material innovation.

特徴仕様技術文書 Videos サービス Support

特徴

Process customization with extensive power delivery parameters
Advanced process management through a tiered approach to arc mitigation
Compact, single-unit solution (up to 30 kW)
Set Point Compensation™ technology for stable throughput
Wide operational range to enable a variety of process materials
Compatible with PowerInsight by Advanced Energy™

メリット

Precise sputtering of dielectric and conductive films
Expanded process control, flexibility, and innovation
High film quality and throughput
Repeatable, customizable films
Higher power levels with reduced arc damage
Easy integration and control

仕様

冷却:	Hybrid (air and water)
出力周波数（MHz、kHz）:	5 to 150 kHz
入力電圧 (V):	400, 440, 440-480 VAC
出力レベル（kW）:	10 to 30 kW
ラック幅:	Full rack
高さ（インチ）:	4U, 6U
出力電圧範囲 (V):	400-1000V
通信インターフェース:	Ethernet, EtherCAT, ProfiNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
高度な機能:	Progressive arc management
プロセスアプリケーション:	Deposition
点火電圧 (V):	1200

すべての仕様仕様の崩壊

技術文書

タイトル	タイプ
Ascent AP Data Sheet (9 MB)	パンフレット
PowerInsight by Advanced Energy (6 MB)	パンフレット
Ascent SMS AP 10 Brochure (5 MB)	データシート
Optimizing Static Deposition Processes White Paper (779 KB)	ホワイトペーパー

テクニカル・ビデオ

Exclusive Dynamic Reverse Pulsing Technology for Plasma Power

10月 18, 2024

Dynamic Reverse Pulsing (DRP) is an AE patented power deliver configuration for coating large-area substrates that is exclusive to AE plasma power products. See how DRP provides synchronous power delivery to increase throughput and flexibility of coating systems. Learn more: • Ascent AMS II Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-ams-ii/ • Ascent DMS Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-dms/ • Ascent AP Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-ap/ • Glass: https://www.advancedenergy.com/en-us/applications/industrial/manufacturing/glass/

サービス

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

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PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

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