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PEII Low Frequency Power Supply
Active
The PEII power supply provides 40 kHz pulse width modulation (PWM). It features advanced arc control and internal load matching with outputs of up to 60 kW when units are combined—requiring no external hardware such as transformers or tuners. The power supply also offers two distinct arc-handling circuits, and the floating output can be grounded on either side.
特徴
• High power density
• Wide tap range
• Regulation on power, voltage, or current
• Enhanced arc control
• Automatic process safeguard
• Flexible modularity
• Efficient, compact design
• Wide tap range
• Regulation on power, voltage, or current
• Enhanced arc control
• Automatic process safeguard
• Flexible modularity
• Efficient, compact design
メリット
• Dual-cathode and other reactive sputtering applications used to create energy-efficient optical and glass coatings
• Dual-cathode PECVD that produce film and plastic coatings for decorative films, food packaging, capacitor films, and other films
• PECVD, DLC, metal oxides, and carbon coatings that provide tool and tribological coatings
• Dual-cathode PECVD that produce film and plastic coatings for decorative films, food packaging, capacitor films, and other films
• PECVD, DLC, metal oxides, and carbon coatings that provide tool and tribological coatings
仕様
| 冷却: | Water |
|---|---|
| 出力周波数（MHz、kHz）: | 40 kHz |
| 入力電圧 (V): | 208, 400 VAC |
| 出力レベル（kW）: | 5, 10 kW |
| ラック幅: | Full Rack |
| 高さ（インチ）: | 4U |
| 通信インターフェース: | Analog |
| プロセスアプリケーション: | Reactive sputtering |
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