.svg){kind=logo}
.png)
.png?resizemode=force&maxsidesize=124)
新しい
NavX™
Active
Ultrafast, RF-synchronized Tuning to Multi-Level Pulse States
The NavX™ matching network redefines tuning speed, sophistication, and RF synchronization for exacting plasma control across the most complex pulsing profiles. Its groundbreaking Advanced Selectable Tuning controls allow accelerated analysis for impedance matching to your chosen number of process pulse states. This proprietary algorithm instantly reduces reflected power in processes with shorter RF on times. Paired with the eVerest™ generator, NavX completes AE’s latest RF delivery system, enabling unparalleled control of plasma characteristics as the industry sets its sights on Angstrom scale geometries.
特徴
- Advanced Selectable Tuning enables impedance maching to single or multiple pulse states.
- Direct synchronization with the eVerest RF generator accelerates tuning speed and eliminates delays associated with separate match communications.
- Hardware and algorithm tuning while processng: AE's proprietary Velocity Tuning algorithm enables ultrafast tuning in pulsing steps.
- The NavX + eVerest RF delivery system's ±10% frequency range enables faster tuning and access to a wider impedance range.
- Improved sensor calibration minimizes unit-to-unit deviation for better repeatability.
メリット
- Enhanced repeatability, yield, and throughput
- Precise control of plasma characteristics
- Increased process parameter customization
- Optimized response speed for control during rapid pulse sequences
- Expanded access to new energy regimes through scalable pulse states
仕様
| 冷却: | Air or Water |
|---|---|
| 出力周波数（MHz、kHz）: | 1MHz to 60 MHz |
| 入力電圧 (V): | 24 VDC |
| 出力レベル（kW）: | 1 to 10 kW |
| 通信インターフェース: | EtherCAT, Ethernet, RS-232 |
| 高度な機能: | Multi Level Pulsing, Advanced Selectable Tuning, ± 10% frequency range |
| プロセスアプリケーション: | Etch, PECVD, PVD, PEALD, ALE |
| コンプライアンス: | CE, Semi S2 |
技術文書
テクニカル・ビデオ
Unleash the Power: NavX™ RF Matching Network
6月 25, 2024
The next inflection in #semiconductor technology requires ultra-fast, synchronized impedance matching for the rapid pulsing, frequent transitions, and longer recipes of next-gen processes. The NavX™ RF matching network redefines tuning speed, sophistication, and RF generator synchronization for exacting plasma control across the most complex pulsing profiles. Its groundbreaking Advanced Selectable Tuning controls allow accelerated processing for impedance matching to your chosen number of process pulse states. This proprietary algorithm instantly reduces reflected power in processes with shorter RF on times. Paired with the eVerest™ generator, NavX RF match network completes AE’s latest RF plasma power delivery system, enabling unparalleled control of plasma characteristics as the industry sets its sights on Angstrom scale geometries.
Close Popup
.png?resizemode=force&maxsidesize=408)
サービス
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
24/5サポートをご利用下さい
エンジニアによる専門的なアドバイス
当社は、お客様に優れたカスタマーサービスとテクニカルサポートを提供することをお約束します。ライブチャットと電話サポートで、適任のエンジニアにいつでもご相談いただけます。
今すぐサポートを受ける