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Apex RF Generator
High-Power Density for Compact Installation
特徴
- High power density in a streamlined design
- On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
- Wideband control loops
- Optional pulse control
- High-speed arc management
メリット
- Readily integrate process tools with enhanced flexibility
- Stabilize plasma operation
- Improve yield for fast arc management
- Easily customize and configure to your process requirements
仕様
| 冷却: | water |
|---|---|
| 出力周波数（MHz、kHz）: | 13.56 MHz |
| 入力電圧 (V): | 208 VAC |
| 出力レベル（kW）: | 1.5 to 10 kW |
| ラック幅: | 1/2 rack and full rack |
| 高さ（インチ）: | 3U |
| 通信インターフェース: | RS-232, Analog, ethernet, DeviceNet |
| 高度な機能: | Pulsing, CEX |
技術文書
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Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Field services and On-Site Training
Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
