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Omni™ RF Diagnostic Cart
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Calibrate with Accuracy, Optimize with Confidence.
The Omni™ RF diagnostic cart is a comprehensive solution to optimize power delivery for critical semiconductor processes. It provides accurate RF calibration and diagnostics by combining AE’s 5540A RF Power Meter with PowerInsight by Advanced Energy™ IoT enabled data ecosystem into a single, user-friendly cart.
특징
- One RF power meter (combination of sensor and meter design) can be configured up to six frequencies
- Power accuracy of ±0.5% + 0.5 W across power range
- Frequency range band of 0.2 to 200 MHz, 5 kW
- Automatic or manual modes of measurement
- Metadata tagging and data storage capability for long term monitoring
- Local and remote monitoring access via touchscreen, HDMI, USB-C, or LAN
- Dashboards and alerts for visualization and predictive analytics
- Data export to CSV file
- Mobile cart with four locking swivel casters
혜택
- Optimize RF power delivery for critical semiconductor processes
- Configuration of up to 6 frequencies within a single sensor lowers investment cost (covers 400 kHz, 2 MHz, 13.56 MHz, 27 MHz, 40 MHz, 60 MHz, and more)
- Yearly calibration of the sensor – ease of maintenance and lower operating costs
- Agnostic – measures RF power from non-AE power products
- Accessibility to sensor for ease of calibration and servicing
- Unique data collection features to track trends and reduce equipment downtime and operational costs
- Mobile design for easy navigation within fabs
- Customizations provided upon request
사양
| Cart Dimensions (L x W x H): |
48in. (51in. to handle) x 18.2in. x 35.6in. (41.1in. display raised) |
|---|---|
| Cart Input Voltage: |
100/230 VAC, +/-10%, 50/60 Hz |
| Cart Communications: |
USB-A, RJ-45, X5 RJ-45, USB-C, HDMI |
| RF power sensor frequency range: |
0.2 to 200 MHz |
| RF power sensor accuracy: |
+/- (0.5% of Rdg + 0.5 W) at the calibrated frequencies and power ranges |
| 50-ohm Load Power: |
10 kW |
| 50-ohm Load Cooling: |
Oil and air cooling with fans |
| PowerInsight HMI: |
10.1in. adjustable touchscreen tablet |
Featured Resources
기술 문서
Product Information Documents
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서비스
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
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