.svg){kind=logo}
.png)
RF Delivery System eVerest™ and NavX™
Unleash the Power
특징
- ±10% frequency range
- PowerInsight by Advanced Energy IoT platform
- Multi-level pulse tuning
- Accelerated internal signal processing
- Frequency tuning
혜택
- Ultimate control of plasma characteristics
- Expanded access to new energy regimes
- Increased power stability during pulsing and process transitions
- Unprecedented RF power repeatability run-to-run
사양
| 냉각: | Water |
|---|---|
| 출력 주파수(MHz, kHz): | 1 to 60 MHz |
| 입력 전압(V): | 208, 400-480 VAC |
| 전력 수준(kW): | 3.5 to 10 kW |
| 랙 너비: | Half and Full rack |
| 높이(인치): | 3U |
| 통신 인터페이스: | EtherCAT, Ethernet, RS-232 |
| 고급 기능: | Multi-level Pulsing, arc management, CEX, MBFT |
Featured Resources
eVerest and NavX RF Delivery System
Forming a complete RF delivery system, the eVerest™ RF generator and NavX™ matching network propel process innovation as chips approach Angstrom scale geometries
eVerest Brochure
eVerest’s configurable multi-level pulsing enables instantaneous or user-defined transition timing. Download eVerest brochure for details on benefits, features, specifications and more.
NavX Matching Network Brochure
Innovate beyond the nanometer. The NavX™ matching network redefines tuning speed, sophistication, and RF synchronization for exacting plasma control across the most complex pulsing profiles
기술 문서
기술 동영상
Unleash the Power: NavX™ RF Matching Network
서비스
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
