홈 Products Plasma Power Products Pulsed and DC Power Systems Ascent DMS Pulsed and DC Power System

Ascent DMS Pulsed and DC Power System

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Advanced Dual-Magnetron Sputtering Accessories

The Ascent® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the Ascent DMS accessory distinguishes itself as truly next-generation technology. Cost-effective, scalable, and versatile, it minimizes complexity, increases quality, and boosts throughput to enable advanced process innovation. The Ascent DMS MF-120 package provides cost-effective, mid-frequency power for standard cathodes, while delivering bipolar pulsing technology benefits.

특징 사양 기술 문서 Videos 서비스 Support

특징

Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
Selectable frequency (500 Hz to 50 kHz)
Adjustable duty cycle — independent power ratio regulation for each magnetron
Advanced process management through a tiered approach to arc mitigation
CEX (phase synchronization)

혜택

Increased film value: Repeatable, customizable deposited films
Lower cost of ownership and increased productivity
Higher power levels with improved stability and reduced arc damage
Easy scalability, integration, and support
Modular design allows you to pay for only what you need while enabling future capability expansion

사양

냉각:	Hybrid (air and water)
출력 주파수(MHz, kHz):	0.5 to 50 kHz
입력 전압(V):	100 to 240 VAC
전력 수준(kW):	40 to 120 kW
랙 너비:	Full rack
높이(인치):	6U, 10U
출력 전압 범위(V):	400-1000 V
통신 인터페이스:	Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
고급 기능:	Progressive arc management
애플리케이션 처리:	Deposition
점화 전압(V):	1200
규정 준수:	EU RoHS, CE, NRTL, SEMI S2, SEMI F47

모든 사양 사양 축소

기술 문서

제목	유형
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB)	사례 연구
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB)	백서
Optimizing Static Deposition Processes White Paper (779 KB)	백서
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB)	백서

기술 동영상

Exclusive Dynamic Reverse Pulsing Technology for Plasma Power

10월 18, 2024

Dynamic Reverse Pulsing (DRP) is an AE patented power deliver configuration for coating large-area substrates that is exclusive to AE plasma power products. See how DRP provides synchronous power delivery to increase throughput and flexibility of coating systems. Learn more: • Ascent AMS II Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-ams-ii/ • Ascent DMS Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-dms/ • Ascent AP Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-ap/ • Glass: https://www.advancedenergy.com/en-us/applications/industrial/manufacturing/glass/

From Sand to Shine: Optimizing Glass Production and Coating

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Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

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Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

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