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eVerest® RF Generator
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Angstrom-Era Precision Power
As the semiconductor industry speeds toward a new inflection, the eVerest™ RF generator fills the need for transformational plasma control. Its configurable multi-level pulsing enables instantaneous or user-defined transition timing. Additionally, high-speed, high-accuracy model-based frequency tuning with wide frequency sweep range provides greater process stability and control. These capabilities, plus faster setpoint response, controlled overshoot at the beginning of pulsing states, and sophisticated PowerInsight by Advanced Energy™ IoT intelligence empower process innovation for the next technology node.
특징
- Full RF delivery system, multiple options for matching solutions, and intelligent synchronization
- Speed and control within programmable multi-level pulse profiles
- High-speed RF output response and pulse-state rise/fall times
- Up to ±10% frequency tuning range
- Designed-in dP/dZ stability
- PowerInsight by Advanced Energy™ IoT ecosystem
혜택
- Enables novel process development for < 2 nm deposition and etch profiles
- Provides reliable ignition with RF stability independent of cable length
- Integrates seamlessly into any plasma system
- Increases process space and widens stability window
- Backed by worldwide product and application support from local service centers
사양
| 냉각: | Water |
|---|---|
| 출력 주파수(MHz, kHz): | 1 to 60 MHz |
| 입력 전압(V): | 208, 400-480 VAC |
| 전력 수준(kW): | 3.5 to 10 kW |
| 랙 너비: | Half and Full rack |
| 높이(인치): | 3U |
| 통신 인터페이스: | EtherCAT, Ethernet, RS-232, DeviceNet |
| 고급 기능: | Multi-level Pulsing, arc management, CEX, MBFT |
Featured Resources
eVerest and NavX RF Delivery System
Forming a complete RF delivery system, the eVerest™ RF generator and NavX™ matching network propel process innovation as chips approach Angstrom scale geometries
리소스 보기
eVerest Brochure
eVerest’s configurable multi-level pulsing enables instantaneous or user-defined transition timing. Download eVerest brochure for details on benefits, features, specifications and more.
리소스 보기
Navigator II Digital Matching Networks Brochure
Navigator II matching network provides rapid, accurate, and reliable matching across a wide range of power requirements. Download Navigator II Brochure for details regarding product specifications, electrical specifications, mechanical specifications and more
리소스 보기
기술 문서
Product Information Documents
Updated
기술 동영상
Unleash the Power: NavX™ RF Matching Network
6월 25, 2024
The next inflection in #semiconductor technology requires ultra-fast, synchronized impedance matching for the rapid pulsing, frequent transitions, and longer recipes of next-gen processes. The NavX™ RF matching network redefines tuning speed, sophistication, and RF generator synchronization for exacting plasma control across the most complex pulsing profiles. Its groundbreaking Advanced Selectable Tuning controls allow accelerated processing for impedance matching to your chosen number of process pulse states. This proprietary algorithm instantly reduces reflected power in processes with shorter RF on times. Paired with the eVerest™ generator, NavX RF match network completes AE’s latest RF plasma power delivery system, enabling unparalleled control of plasma characteristics as the industry sets its sights on Angstrom scale geometries.
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