홈 Products Sense and Measurement Temperature Sensing Fiber Optic Sensors Luxtron M-1100 Fiber Optic Temperature Converter

Luxtron M-1100 Fiber Optic Temperature Converter

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Fiber optic temperature sensing for semiconductor in etch and deposition applications

영업팀에 문의 데이터 시트

The Advanced Energy's Luxtron^® M-1100 is the latest FluorOptic^® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLux^TMand RubiLux^TMhave been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C.

특징 사양 기술 문서 소프트웨어 Support

특징

Wide supported temperature range
Low noise level with fast response rate
5 channels in a single converter
Flexible communication outputs
EtherCAT Interface (optional)
Analog output

혜택

Non-contact measurement to minimize the thermal offset
Easy to install into OEM equipment
Achieve high accuracy and a extreme temperature control for different etching and wafer fab processes
Utilize AE's experienced application engineering support to develop custom probes for OEMs

사양

작동 온도 범위(°C):	5 to 60
채널 수:	Up to 5
정확도:	± 0.5 °C
소음(°C):	≤ 0.05 °C
측정 범위:	-200 to 450
통신 인터페이스:	ECAT, 4 to 20 mA or 0 to 10 V

기술 문서

제목	유형
Etching and Wafer Fab Equipment Application Note (131 KB)	애플리케이션 노트
A Brief History of Phosphor Thermometry (1 MB)	기사
Luxtron M-1100 Data Sheet (290 KB)	데이터 시트
Luxtron® Fiber Optic Thermometry Probes & Accessories (310 KB)	데이터 시트

소프트웨어

TrueTemp+

다운로드

비교

Model	Luxtron M-1100	Luxtron M900	WaveCapture FBG Analyzer Series
채널 수	Up to 5	4 to 64	1
정확도	± 0.5 °C	±0.5 to ± 0.1 °C	+/-5 pm
소음(°C)	≤ 0.05 °C	< 0.1 °C	1 pm
통신 인터페이스	ECAT, 4 to 20 mA or 0 to 10 V	RS232, RS485	USB 2.0, RS232, Ethernet IEEE 802.3