首页产品高压电源静电吸盘

电子吸盘

几十年来，Advanced Energy 的 Trek 电子吸盘电源一直是半导体行业不可或缺的设备。Trek 电源可以帮助您提高产量，增加正常运行时间，从根本上消除晶圆粘着和晶圆爆裂等问题，并减少背面气体错误。

Control parameters such as over-current, wafer-present, and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control
Increases efficiency and throughput with custom clamp and declamp sequences and wave shapes
Eliminates sticky/popping wafer issues

Fast-rise charging power delivered from an optimized design
Limited overshoot, typically less than 1% of high voltage setpoint, depending on the application
Fully-integrated dual output package

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