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脉冲和直流电源系统

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利用 Advanced Energy 全面的直流和脉冲直流套件推进等离子工艺创新，在提高沉积率、改善薄膜平整度和堆积密度的同时最大限度减少电弧。

脉冲和直流电源系统

Ascent AMS II Pulsed and DC Power System

  • Water cooling
  • Modular and scalable
  • Embedded PowerInsight® by Advanced Energy™ IoT intelligence
  • Wide mains voltage range
  • Expanded operating range
  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc-Sync™ technology — primary/secondary up to 12 units
  • Ethernet, EtherCAT®, Profibus ,RS-232/485, Ethernet/IP, and analog communications

Ascent DMS Pulsed and DC Power System

  • Modular and scalable (40, 60, and 120 kW models configurable up to 240 kW)
  • Selectable frequency (500 Hz to 50 kHz)
  • Adjustable duty cycle — independent power ratio regulation for each magnetron

Ascent AP Pulsed and DC Power System

  • Process customization with extensive power delivery parameters
  • Advanced process management through a tiered approach to arc mitigation
  • Compact, single-unit solution (up to 30 kW)

Pinnacle III DC Power Supply

  • Produce the best films possible with accurate, repeatable power and leading, low-delivered ARC energy

Pinnacle III Plus+ Pulsed DC Power Supply

  • Adjustable frequency range of 5 to 350 kHz 
  • Variable duty cycle up to 45% 
  • Wide voltage range — single-tap wide impedance range 

PEII Low Frequency Power Supply

  • High power density
  • Wide tap range
  • Regulation on power, voltage, or current
  • Enhanced arc control
  • Automatic process safeguard
  • Flexible modularity
  • Efficient, compact design

Solvix® DC and Pulsed Power Supply

  • Proven reliability, accuracy, and repeatability
  • Worldwide support network
  • Reduced substrate damage and process contamination
  • Best-in-class arc handling
  • DC and pulsed-DC units
  • Current, power, and voltage regulation modes
  • Flexible architecture
  • Air cooling
  • Multiple units configurable for high-power requirements
  • High peak-to-peak voltages (high-frequency models)
  • Patented tapless wide output load impedance range (medium-frequency models)

Ascent AMS Pulsed and DC Power System

  • Arc Management System™ (AMS) technology — customer pre-sets for metal and ceramic targets
  • Set Point Compensation™ technology
  • Arc Sync® technology — primary/secondary up to 12 units

特色产品

特色

Ascent AP Pulsed and DC Power System

Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

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