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Ascent AP Pulsed and DC Power System

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Unprecedented Power Control for Single- and Dual-Magnetron Sputtering

Building on AE®’s premier bipolar pulsed-DC technology, Ascent® AP power supplies extend your ability to optimize output with advanced pulse shaping, as well as four-block progressive arc management that includes full voltage reversal and self-adjusting arc parameters. This compact solution’s patented pulsing technology proactively inhibits arcs, while its wide operational range unlocks material options to extend single- and dual-magnetron process flexibility and material innovation.

特点

  • Process customization with extensive power delivery parameters
  • Advanced process management through a tiered approach to arc mitigation
  • Compact, single-unit solution (up to 30 kW)
  • Set Point Compensation™ technology for stable throughput
  • Wide operational range to enable a variety of process materials
  • Compatible with PowerInsight by Advanced Energy™

益处

  • Precise sputtering of dielectric and conductive films
  • Expanded process control, flexibility, and innovation
  • High film quality and throughput
  • Repeatable, customizable films
  • Higher power levels with reduced arc damage
  • Easy integration and control

规格

冷却: Hybrid (air and water)
输出频率(兆赫、千赫): 5 to 150 kHz
输入电压 (V): 400, 440, 440-480 VAC
功率等级(千瓦): 10 to 30 kW
机架宽度: Full rack
高度(英寸): 4U, 6U
输出电压范围 (V): 400-1000V
通信接口: Ethernet, EtherCAT, ProfiNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
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服务

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

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