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Ascent DMS Pulsed and DC Power System

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Advanced Dual-Magnetron Sputtering Accessories

The Ascent® DMS series offers unprecedented power-delivery ease and control for dual-magnetron sputtering, enabling precise tuning of film characteristics. With selectable frequency, regulation mode, and duty cycle, as well as low stored energy and simplified, modular system configuration, the Ascent DMS accessory distinguishes itself as truly next-generation technology. Cost-effective, scalable, and versatile, it minimizes complexity, increases quality, and boosts throughput to enable advanced process innovation. The Ascent DMS MF-120 package provides cost-effective, mid-frequency power for standard cathodes, while delivering bipolar pulsing technology benefits.

特点规格技术文档 Videos 服务 Support

特点

Modular and scalable (40, 60, and 120 kW models configurable up to 180 kW)
Selectable frequency (500 Hz to 50 kHz)
Adjustable duty cycle — independent power ratio regulation for each magnetron
Advanced process management through a tiered approach to arc mitigation
CEX (phase synchronization)

益处

Increased film value: Repeatable, customizable deposited films
Lower cost of ownership and increased productivity
Higher power levels with improved stability and reduced arc damage
Easy scalability, integration, and support
Modular design allows you to pay for only what you need while enabling future capability expansion

规格

冷却:	Hybrid (air and water)
输出频率（兆赫、千赫）:	0.5 to 50 kHz
输入电压 (V):	100 to 240 VAC
功率等级（千瓦）:	40 to 120 kW
机架宽度:	Full rack
高度（英寸）:	6U, 10U
输出电压范围 (V):	400-1000 V
通信接口:	Ethernet, EtherCAT, DeviceNet, Profibus, RS-232/485, EtherNet/IP, and analog communications
高级功能:	Progressive arc management
流程应用:	Deposition
点火电压 (V):	1200
合规性:	EU RoHS, CE, NRTL, SEMI S2, SEMI F47

所有规格折叠规格

技术文档

标题	类型
Optimizing Glass Process Stability, Throughput with the PowerInsight by Advanced Energy™ IoT Solution (404 KB)	案例研究
Modeling Crazing or Lightning Arc Defects in Large Area Systems (264 KB)	白皮书
Optimizing Static Deposition Processes White Paper (779 KB)	白皮书
Raising the Bar on Reactive Deposition Sputter Rates White Paper (2 MB)	白皮书

技术视频

Exclusive Dynamic Reverse Pulsing Technology for Plasma Power

10月 18, 2024

Dynamic Reverse Pulsing (DRP) is an AE patented power deliver configuration for coating large-area substrates that is exclusive to AE plasma power products. See how DRP provides synchronous power delivery to increase throughput and flexibility of coating systems. Learn more: • Ascent AMS II Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-ams-ii/ • Ascent DMS Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-dms/ • Ascent AP Pulsed and DC Power System: https://www.advancedenergy.com/en-us/products/plasma-power-products/pulsed-and-dc-power-systems/ascent-ap/ • Glass: https://www.advancedenergy.com/en-us/applications/industrial/manufacturing/glass/

From Sand to Shine: Optimizing Glass Production and Coating

服务

Total Service Package

We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

Service Agreements

Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.

Agreement Term Options

Product Family	Calibration	Calibration with Alignment				Total Support Package (TSP)
Term of Agreement	Annual	One Year	Two Years	Three Years	Five Years	One Year	Two Years	Three Years	Five Years
TEGAM 5540
Lumasense
Plasma Power

PowerInsight

Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.

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Field services and On-Site Training

Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.

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Submit an RMA Form