射频匹配网络

Forming a complete RF delivery system, the eVerest™ RF generator and NavX™ matching network propel process innovation as chips approach Angstrom scale geometries

Innovate beyond the nanometer. The NavX™ matching network redefines tuning speed, sophistication, and RF synchronization for exacting plasma control across the most complex pulsing profiles

Transform power delivery data into unique insights with advanced analytics and machine learning techniques.

Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.

The versatile Navigator® II matching network's advanced technology provides rapid, accurate, and reliable matching across a wide range of power requirements up to 30 kW and frequencies up to 60 MHz.

Predicting the remaining life of vacuum capacitors, key components of match networks, can help prevent unplanned downtime and costly maintenance of the wafer chamber and the match network.

This paper is intended to help understanding and to dispel myths surrounding RF measurements and practice.