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首页产品等离子电源产品射频匹配网络

射频匹配网络

Advanced Energy 的匹配网络可在多个功率范围内实现快速、准确和可靠的匹配。提供即插即用型号或可配置机组，安装简便，可加快调谐并加强工艺控制。

射频匹配网络

Navigator II

Digital architecture with enhanced tuning algorithms
Pulsed-RF power delivery
Sweep-frequency operation

Navio Match Network

Quick, accurate, and repeatable impedance matching
Optimized, off-the-shelf functionality for many applications
Generous menu of configuration options for more sophisticated processes

NavX™

Advanced Selectable Tuning
Tight synchronization with eVerest RF generators
Optimized hardware and tuning algorithm
±10% frequency range

特色产品

特色资源

Navigator II Digital Matching Networks Brochure

Navigator II Vacuum Capacitor Health Predictive Maintenance with PowerInsight

技术文档

标题	类型
Precise Power Control in 3D Device Architectures (647 KB)	应用说明
eVerest and NavX RF Delivery System (5 MB)	手册
eVerest Brochure (12 MB)	手册
NAVIGATOR® II 数字匹配网络 (2 MB)	手册
NavX Matching Network Brochure (18 MB)	手册
PowerInsight by Advanced Energy (6 MB)	手册
PowerInsight by Advanced Energy Brochure (6 MB)	手册
RF Calibration Solutions (530 KB)	手册
RF Calibration Solutions (530 KB)	手册
Navigator II Vacuum Capacitor Health Predictive Maintenance with PowerInsight (461 KB)	案例研究
Navigator II Vacuum Capacitor Health Predictive Maintenance with PowerInsight Case Study (461 KB)	案例研究
Navigator II Digital Matching Networks Brochure (10 MB)	数据表
Navigator II Digital Matching Networks Brochure (10 MB)	数据表
Navio Data Sheet (2 MB)	数据表
Navio Datasheet - Chinese (2 MB)	数据表
Forward and Reflected Power: What Does It Mean? (576 KB)	白皮书

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半导体

AE 可提供精确的等离子功率传输和精密的高速控制，为下一代工艺创新铺平道路。

探索半导体

沉积

AE 为半导体沉积提供全面的产品组合，包括等离子电源输送、温度测量、温度控制和晶圆控制解决方案。

蚀刻

Advanced Energy 的高精度等离子体功率传输系统可对蚀刻应用进行精确控制，从而实现高重复性和高产量。

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