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Navigator II
Rapid, Accurate, and Reliable Digitally-Tuned Matching
The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms, enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance, allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.
特点
- Digital architecture with enhanced tuning algorithms
- Pulsed-RF power delivery
- Sweep-frequency operation
- Intermodulation distortion (IMD) immunity for multi-frequency applications
- Real-time process power and impedance measurement
益处
- Speeds tuning/matching response time
- Tightens process control
- Helps increase tool throughput and product yield
规格
| 冷却: | Hybrid (air and water) |
|---|---|
| 输出频率（兆赫、千赫）: | 400 kHz to 60 MHz |
| 输入电压 (V): | 110 VAC |
| 功率等级（千瓦）: | 1 to 60 kW |
| 机架宽度: | N/A, chamber mounted |
| 通信接口: | EtherCAT, Ethernet, DeviceNet, RS-232 |
| 高级功能: | Pulsing, CEX |
| 流程应用: | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE |
技术文档
服务
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Field services and On-Site Training
Our field service engineers are available to support your on-site needs. We can properly secure and mount products, hook up your electrical connections, validate alignment and calibrate, and test to your specifications.
PowerInsight
Power your process with data using PowerInsight by Advanced Energy™, transforming data into actionable intelligence with advanced analytics and machine learning, enabling you to improve yield and reduce unplanned downtime.
