射频等离子体发生器

Forming a complete RF delivery system, the eVerest™ RF generator and NavX™ matching network propel process innovation as chips approach Angstrom scale geometries

eVerest’s configurable multi-level pulsing enables instantaneous or user-defined transition timing. Download eVerest brochure for details on benefits, features, specifications and more.

半導体産業が新たな変換点に向けて加速する中、eVerest™RF電源はプラズマ制 御の変革要求に応えます。

PowerInsight acts as a flight recorder, capturing AE power delivery system performance data. Download PowerInsight brochure to see how AE's IoT solutions meet your needs.

Navigator II matching network provides rapid, accurate, and reliable matching across a wide range of power requirements. Download Navigator II Brochure for details regarding product specifications, electrical specifications, mechanical specifications and more

Paramount HF RF Power Delivery Systems offer precise RF control to enable rapid plasma changes, while its flexible digital architecture, wide output coverage, and comprehensive feature set facilitate process customization. Download Paramount HF Brochure to discover how the RF Power Delivery Systems meet your needs.