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Navio Match Network
Economical, Digital, Configurable Matching Network Solution
- Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
- Efficient and stable power delivery
- Compact and air-cooled (standard package or slim version)
特徴
- Quick, accurate, and repeatable impedance matching
- Optimized, off-the-shelf functionality for many applications
- Generous menu of configuration options for more sophisticated processes
- Wide power and frequency ranges
- Compact air-cooled unit available in a standard or slim version
メリット
- Improve throughput, increase yield, and reduce production costs
- Choose a standard model or configure a unit that meets your system requirements
- Install and operate with ease
- Obtain excellent repeatability for high process yield
仕様
| 冷却: | Air |
|---|---|
| 出力周波数（MHz、kHz）: | 13 MHz |
| 入力電圧 (V): | 24 VDC or 110 VAC |
| 出力レベル（kW）: | 1 to 5 kW |
| ラック幅: | N/A, chamber mounted |
| 通信インターフェース: | Analog, RS 232 |
| プロセスアプリケーション: | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE |
技術文書
比較する
| Model | Navio | Navigator II |
|---|---|---|
| 出力レベル（kW） | 1 to 5 kW | 1 to 60 kW |
| 通信インターフェース | Analog, RS 232 | EtherCAT, Ethernet, DeviceNet, RS-232 |
| 高度な機能 | Pulsing, CEX | |
| プロセスアプリケーション | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE | Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE |
サービス
Calibration and Alignment
Advanced Energy has the tools and processes to ensure your equipment continues to meet its original specifications. Our products are calibrated at global AE service sites with proprietary technology designed to exceed industry standards.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Exchange Program
Set up a custom exchange program of managed spares to reduce capitial equipment investment and minimize downtime associated with routine maintenance and repair.
Refurbishments
Extend product life and reduce mean time between failure by replacing time-dependent components during reactive or preventative maintenance. Get the performance you would expect at the time of original manufacture for a fraction of the cost of a new unit
Repair
Our worldwide service centers provide fast cycle times, use only AE-qualified parts, and follow the original product's specifications and test procedures for the highest quality repair or calibration.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Service Agreements
Reduce annual maintenance costs and simplify forecasting by building a custom service agreement into your annual operating plan. We have the capability, expertise, and capacity to provide repair services, upgrades, refurbishments, exchange, and other service offerings to support maintenance and use of AE Products. We offer multi-year contracts and provide faster turnaround time for covered products.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Total Service Package
We offer customized service bundles that include calibration, alignment, and extended warranty. Services will include scheduled calibration with adjustment and repairs as needed. Any software/firmware upgrades are also made available for customers.
| Product Family | Calibration | Calibration with Alignment |
Total Support Package (TSP) |
||||||
|---|---|---|---|---|---|---|---|---|---|
| Term of Agreement | Annual | One Year | Two Years | Three Years | Five Years | One Year | Two Years | Three Years | Five Years |
| TEGAM 5540 | | | | | | | | | |
| Lumasense | | | | | | | | ||
| Plasma Power | | | | | | | |||
Trade In
Leverage your original investment and reduce the cost of a new unit by trading in your old unit.
Upgrades & Enhancements
Take advantage of the latest engineering innovations to optimize long-term product performance. Add custom-engineered solutions to utilize new feature sets and functionality
Used Equipment
We have a catalog of high-quality current, and legacy used products that have been fully tested and maintained. These products are covered under warranty with options available for extended warranty as well.
