홈 Products Plasma Power Products Pulsed and DC Power Systems Solvix® DC and Pulsed Power Supply

Solvix® DC and Pulsed Power Supply

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3 to 30 kW DC and Pulsed-DC Power Supplies

Solvix DC and pulsed-DC power supplies for metallic and reactive sputtering provide precise control and proven reliability—backed by AE’s worldwide support network. Offering a wide range of power and frequency levels, pulsing, and multiple communications options, they offer a rugged and cost-effective solution for your unique process.

특징

•   Best-in-class arc handling
•   DC and pulsed-DC units
•   Current, power, and voltage regulation modes
•   Flexible architecture
•   Air cooling
•   Multiple units configurable for high-power requirements
•   High peak-to-peak voltages (high-frequency models)
•   Patented tapless wide output load impedance range (medium-frequency models)

혜택

•   Proven reliability, accuracy, and repeatability
•   Worldwide support network
•   Reduced substrate damage and process contamination
•   Adaptability to a wide range of process requirements
•   High throughput

사양

냉각:	Air
출력 주파수(MHz, kHz):	Pulsing and non-pulsing options available. Please refer to Datasheet.
입력 전압(V):	400, 480 VAC
전력 수준(kW):	Multiple options available. Please refer to Datasheet.
랙 너비:	Full Rack
높이(인치):	4U, 6U
통신 인터페이스:	Analog, Profibus, EtherCat, RS-485
애플리케이션 처리:	Hard coating
점화 전압(V):	1000